
Full-automatic High Temperature Clean Oxidation Free Oven
Description:
- Full-automatic oven compatible with EFEM or robotic arms, which can directly upload relevant data to the server for achieving automatic operation of unmanned factories.
- Built-in sensors
- Built-in drives
Features
Automatic Control and Integration via IoT- Built-in sensors : temperature sensor, oxygen content detector, N2 content sensor, detector for battery capacity of automatic guided vehicle (AGV), detector for material presence (loader/unloader/oven), detector for automatic switching position.
- Built-in drives : one networked PLC controller is equipped between the loader and each of various oven devices such as oven automatic switching motor & controller, automatic guided vehicle (AGV) (driven motor and stacker) and flow control motor; and one loader and each robotic arm is connected via WiFi network.
Application
Various industries that require automated manufacturing, such as semiconductor, PCB, LED, electronics, etc.

OVEN SPECIFICATION (PLC/PC base)

Specification | |
Process Temperature | RT ~450℃ |
Temperature uniformity | ± 1.5% |
Cleanliness | Class 100 |
Cooling Method | Air Cooling(N2/CDA)、Water Cooling |
Compatible Devices | EFEM 、Robots |
Oxygen Content | 20ppm |
Operational Interface | HMI, compatible with CIM, Ethernet & SECS/GEM, PCB ECI |
Optional Device | .Fast air cooling .Solvent recovery system .Detachable inner liner |
Process | Suitable for PR/PI curing and baking of wafer and substrate, which is the best curing solution for packaging wafers and fanout panels. |